Low-contrast surface inspection of mura defects in liquid crystal displays

using optical flow-based motion image analysis

 

StudentHsin-Yang Tsai                                                 Advisor: Dr. Du-Ming Tsai

 

Department of Industrial Engineering and Management

YUAN-ZE University

 

ABSTRACT

 

        This research proposes a machine vision scheme for mura defect detection in TFT-LCD manufacturing. Mura is a Japanese word for blemish, which typically shows brightness imperfections from its surroundings in the surface. Since mura appears as a low-contrast region without clear edges in the surface, human inspectors need to continuously observe the hardly visible defect from different viewing angles. The traditional automatic visual inspection algorithms detect mura defects from individual still images. They neglect that a mura defect may not be visibly sensed in the image from a still system.

 

        In this study, the TFT-LCD panel is assumed to move along a track, where different light sources illuminate from different angles to the inspection panel. While the TFT-LCD panel passes through a fixed camera, the light reflection from different angles can effectively enhance the mura defect in the low-contrast motion images. This research therefore proposes a motion detection scheme based on optical flow techniques to identify mura defects in motion images. Since the TFT-LCD moves along a single direction, both two-dimensional (2D) and one-dimensional (1D) optical flow motion detection methods are developed. Three discriminative features based on the flow magnitude, mean flow magnitude and flow density in the optical flow field are presented to extract the defective regions in each image of the motion sequence. Both real glass substrates and synthetic panels are used to evaluate the efficacy of the proposed inspection schemes. Experimental results have shown that the proposed 1D optical flow method works as well as the 2D optical flow method to detect very low-contrast mura defects of small size, and achieves a high processing rate of 20 frames per second for images of size 200200.

 

Keywords: Machine vision; Defect detection; Motion images; Optical flow; Mura; TFT-LCD inspection

 


 

Demonstration

 

Original images

(Spot mura)

Enhanced images

Detection results

 

 

Original images

(Line mura)

Enhanced images

Detection results